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'description' => 'IT之家 8 月 26 日消息 半导体制造与先进晶圆级封装领域设备供应商,盛美半导体设备今日发布了新产品 --Ultra ECP GIII 电镀设备,以支持化合物半导体 (SiC, GaN) 和砷化镓',
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'content' => '...圆的批量工艺,同时结合了盛美半导体的第二阳极和高速<em>栅板</em>技术,可实现最佳性能。盛美半导体设备表示:"随着电动汽车、5G 通信、RF 和 AI 应用的强劲需求,化合物半导体市场正在蓬勃发展。一直以来,化合物半导体制造工艺...',
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'content' => '...艺,集成预湿和后清洗腔。设备采用盛美上海久经考验的<em>栅板</em>技术进行深孔电镀,以提高阶梯覆盖率。它可达到晶圆内和模内< 3% 的均匀度和< 2% 的重复度。腔体和工艺槽体经过专门设计,可避免金电镀液的氧化,且工艺槽体...',
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